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Handbook of silicon based mems materials and technologies /

Handbook of silicon based mems materials and technologies / Veikko Lindroos...et al - Amsterdam ; Boston : William Andrew/Elsevier, 2010 - xxxii, 639 pages 28cm Includes Index - Micro &Nano Technologies Series .

ISBN: 9780815515944

Subjects--Topical Terms:
Silicon -- Electric properties.
Microelectromechanical systems -- Materials.
Microelectromechanical systems.

LC Class. No.: TK7875 / .H36 2010

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