Materials and processes for submicron technologies :
Materials and processes for submicron technologies : proceedings of Symposium N on Materials and Processes for Submicron Technologies of the E-MRS Spring Conference, Strasbourg, France, 16-19 June 1998 /
edited by J.M. Martinez-Duart, R. Madar, R.A. Levy.
- Amsterdam ; New York : Elsevier, 1999.
- p. 1002-1175 : ill. ; 29 cm.
- European Materials Research Society symposia proceedings ; v. 89 .
Repr. from Solid state electronics, v.43/6.
Includes bibliographical references.
008043617X (alk. paper)
00689049
GBA0-1190
Microstructure--Congresses.
Semiconductors--Congresses.
Electron transport--Congresses.
TN689.2 / .S877 1998
Repr. from Solid state electronics, v.43/6.
Includes bibliographical references.
008043617X (alk. paper)
00689049
GBA0-1190
Microstructure--Congresses.
Semiconductors--Congresses.
Electron transport--Congresses.
TN689.2 / .S877 1998