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Microfabrication for industrial applications /

Luttge, Regina.

Microfabrication for industrial applications / Regina Luttge. - Oxford ; Waltham, MA : William Andrew, 2011. - xvii, 289 p. : ill. ; 24 cm.

Includes bibliographical references and index.

ISBN: 9780815515821 (hbk.) 0815515820 (hbk.)

LCCN: 2011926754

Subjects--Topical Terms:
Manufacturing processes.
Microfabrication.

LC Class. No.: TS183 / .L88 2011

Dewey Class. No.: 620.5

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