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Interlayer Dielectrics for semiconductor technologies/

Interlayer Dielectrics for semiconductor technologies/ S.P.Murarka, M.Eizenberg, A.K. Sinha[editors] - xiv,444pages

includes bibliographical references and Indexes

ISBN: 0125112211 9780125112215

LC Class. No.: TK7871.85 / .I58 2003

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