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ION IMPLANTATION INTO SEMICONDUCTORS,OXIDES AND CERAMICS

J.K.N.LINDNER

ION IMPLANTATION INTO SEMICONDUCTORS,OXIDES AND CERAMICS J.K.N.LINDNER - AMSTERDAM,NEW YORK ELSEVIER PUBLISHERS 1999 - xiv,442p ill

ISBN: 9780080436135

LC Class. No.: TK 7871.85 / .L56 1999

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