TY  - BOOK
AU  - Helbert,John N.
TI  - Handbook of VLSI microlithography: principles, technology, and applications 
SN  - 0815514441
AV  - TK7874 .H3494 2001
PY  - 2001///
CY  - Norwich, NY
PB  - Noyes Publications/William Andrew Pub.
KW  - Integrated circuits
KW  - Microlithography
ER  -