MEMS :  a practical guide to design, analysis, and applications / 
edited by Jan G. Korvink and Oliver Paul. 
 - Norwich, NY :  Heidelberg, Germany :  W. Andrew Pub. ;  Springer,  c2006. 
 - xxv, 965 p. :  ill. ; 
<br/><br/><label>ISBN: </label>0815514972 (William Andrew : alk. paper) 3540211179 (SpringerVerlag) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.
<br/><br/><label>LC Class. No.: </label>TK7875  / .M42 2006