TY  - BOOK
AU  - Korvink,J.G.
AU  - Paul,Oliver
TI  - MEMS: a practical guide to design, analysis, and applications 
SN  - 0815514972 (William Andrew : alk. paper)
AV  - TK7875 .M42 2006
PY  - 2006///
CY  - Norwich, NY, Heidelberg, Germany
PB  - W. Andrew Pub., Springer
KW  - Microelectromechanical systems
ER  -