Handbook of silicon based mems materials and technologies / 
Veikko Lindroos...et al 
 - Amsterdam ; Boston :   William Andrew/Elsevier,    2010 
 - xxxii, 639 pages 28cm  Includes Index 
 - Micro &Nano Technologies Series .
<br/><br/><label>ISBN: </label>9780815515944 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Silicon -- Electric properties.<br/>Microelectromechanical systems -- Materials.<br/>Microelectromechanical systems. 
<br/><br/><label>LC Class. No.: </label>TK7875  /  .H36 2010