TY  - BOOK
AU  - Tilli, Markku
AU  - Lehto, Ari
AU  - Motooka, Teruaki
TI  - Handbook of silicon based mems materials and technologies
T2  - Micro &Nano Technologies Series
SN  - 9780815515944
AV  - TK7875  .H36 2010
PY  - 2010///
CY  - Amsterdam ; Boston : 
PB  - William Andrew/Elsevier, 
KW  - Silicon -- Electric properties
KW  - Microelectromechanical systems -- Materials
KW  - Microelectromechanical systems.
ER  -