Handbook of VLSI microlithography :  principles, technology, and applications / 
edited by William B. Glendinning, John N. Helbert. 
 - Park Ridge, N.J., U.S.A. :  Noyes Publications,  c1991. 
 - xxii, 649 p. :  ill. ; 
<br/><br/><label>ISBN: </label>0815512813 : 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits<br/>Microlithography.
<br/><br/><label>LC Class. No.: </label>TK7874  / .H3494 1991