TY  - BOOK
AU  - Glendinning,William B.
AU  - Helbert,John N.
TI  - Handbook of VLSI microlithography: principles, technology, and applications 
SN  - 0815512813 :
AV  - TK7874 .H3494 1991
PY  - 1991///
CY  - Park Ridge, N.J., U.S.A.
PB  - Noyes Publications
KW  - Integrated circuits
KW  - Microlithography
ER  -