TY  - BOOK
AU  - Tompkins,Harland G.
AU  - Irene,Eugene A.
TI  - Handbook of ellipsometry
AV  - QC443 .H26 2005
PY  - 2005///
CY  - Norwich, NY, Heidelberg, Germany
PB  - William Andrew Pub., Springer
KW  - Ellipsometry
N1  - Includes bibliographical references and index
ER  -