TY  - BOOK
AU  - Martinez-Duart,J.M.
AU  - Madar,R.
AU  - Levy,Roland A.
ED  - Symposium N on Materials and Processes for Submicron Technologies
ED  - European Materials Research Society.
TI  - Materials and processes for submicron technologies: proceedings of Symposium N on Materials and Processes for Submicron Technologies of the E-MRS Spring Conference, Strasbourg, France, 16-19 June 1998 
SN  - 008043617X (alk. paper)
AV  - TN689.2 .S877 1998
PY  - 1999///
CY  - Amsterdam, New York
PB  - Elsevier
KW  - Microstructure
KW  - Congresses
KW  - Semiconductors
KW  - Electron transport
N1  - Repr. from Solid state electronics, v.43/6; Includes bibliographical references
UR  - http://www.loc.gov/catdir/enhancements/fy0608/00689049-t.html
UR  - http://www.loc.gov/catdir/enhancements/fy0608/00689049-d.html
ER  -