Leach, R. K., <br/><br/>
Fundamental principles of engineering nanometrology / 
Richard Leach. 
 - Second edition. 
 - xxvi, 321 pages :  illustrations ; 
 - Micro & nano technologies series .
 - Micro & nano technologies. .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9781455777532 1455777536 
<br/><br/><label>LCCN: </label>2015431422 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanotechnology.<br/>Microtechnology.<br/>Metrology.<br/>Metrology.<br/>Microtechnology.<br/>Nanotechnology.
<br/><br/><label>LC Class. No.: </label>T174.7  / .L42 2010