TY  - BOOK
AU  - Leach,R.K.
TI  - Fundamental principles of engineering nanometrology
T2  - Micro & nano technologies series
SN  - 9781455777532
AV  - T174.7 .L42 2010
PY  - 2014///
CY  - Amsterdam
PB  - Elsevier, William Andrew
KW  - Nanotechnology
KW  - Microtechnology
KW  - Metrology
KW  - fast
N1  - Includes bibliographical references and index
ER  -