TY  - BOOK
AU  - Luttge,Regina
TI  - Microfabrication for industrial applications
SN  - 9780815515821 (hbk.)
AV  - TS183 .L88 2011
U1  - 620.5 23
PY  - 2011///
CY  - Oxford, Waltham, MA
PB  - William Andrew
KW  - Manufacturing processes
KW  - Microfabrication
N1  - Includes bibliographical references and index
ER  -