TY - BOOK AU - PIERSON, HUGH O TI - Handbook of chemical vapor deposition ( CVD): Principles, technology and applications SN - 9780815513001 AV - TS695 .P52 1992 PY - 1992/// CY - Fairview avenue PB - Noyes Publication KW - Vapor-plating--Handbooks, manuals N1 - includes bibliographical references and indexes ER -