000 01500nam a22003257a 4500
003 OSt
005 20220909070611.0
008 220909b ||||| |||| 00| 0 eng d
020 _a0080436145
040 _aDLC
_cDLC
_dUOK
050 0 0 _aTK7871.15.C35
_bS96 1998
111 2 _aSymposium K on Carbon-based Materials for Microelectronics
_d(1998 :
_cStrasbourg, France)
245 1 0 _aCarbon-based materials for microelectronics :
_bproceedings of Symposium K on Carbon-based Materials for Microelectronics of the E-MRS 1998 Spring Conference, Strasbourg, France, June 16-19, 1998 /
_cedited by J. Robertson, J. Fink, E. Kohn.
246 1 5 _aCarbon 37 (1999)
260 _aAmsterdam ;
_aNew York :
_bElsevier,
_c1999.
300 _a1 v. :
_bill. ;
_c29 cm.
440 0 _aEuropean Materials Research Society symposia proceedings ;
_vv. 86
500 _a"Reprinted from: CARBON, vol. 37/5"--Facing t.p.
504 _aIncludes bibliographical references.
650 0 _aCarbon
_vCongresses.
650 0 _aMicroelectronics
_xMaterials
_vCongresses.
700 1 _aRobertson, J.
_q(John),
_d1950-
700 1 _aFink, J.
_q(Jörg),
_d1938-
700 1 _aKohn, E.
710 2 _aEuropean Materials Research Society.
_bMeeting
_d(1998 :
_cStrasbourg, France)
730 0 _aCarbon (New York)
856 4 2 _3Publisher description
_uhttp://www.loc.gov/catdir/enhancements/fy0611/00698640-d.html
856 4 1 _3Table of contents only
_uhttp://www.loc.gov/catdir/enhancements/fy0611/00698640-t.html
942 _2lcc
_cBK
999 _c10472
_d10472