| 000 | 00539pam a2200157 a 4500 | ||
|---|---|---|---|
| 020 | _a0815512813 : | ||
| 050 | 0 | 0 |
_aTK7874 _b.H3494 1991 |
| 245 | 0 | 0 |
_aHandbook of VLSI microlithography : _bprinciples, technology, and applications / _cedited by William B. Glendinning, John N. Helbert. |
| 260 |
_aPark Ridge, N.J., U.S.A. : _bNoyes Publications, _cc1991. |
||
| 300 |
_axxii, 649 p. : _bill. ; |
||
| 650 | 0 | _aIntegrated circuits | |
| 650 | 0 | _aMicrolithography. | |
| 700 | 1 | _aGlendinning, William B. | |
| 700 | 1 | _aHelbert, John N. | |
| 942 | _cLL | ||
| 999 |
_c5621 _d5621 |
||