000 | 00816nam a22002537a 4500 | ||
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999 |
_c6141 _d6141 |
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001 | 13632538 | ||
005 | 20180924113932.0 | ||
008 | 180924b ||||| |||| 00| 0 eng d | ||
010 | _a 2004014676 | ||
040 |
_aDLC _cDLC _dDLC |
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042 | _apcc | ||
050 | 0 | 0 |
_aQC443 _b.H26 2005 |
245 | 0 | 0 |
_aHandbook of ellipsometry / _cedited by Harland G. Tompkins and Eugene A. Irene. |
260 |
_aNorwich, NY : _bWilliam Andrew Pub. ; _aHeidelberg, Germany : _bSpringer, _cc2005. |
||
300 |
_axvi, 870 p. : _bill. ; _c24 cm. |
||
504 | _aIncludes bibliographical references and index. | ||
650 | 0 | _aEllipsometry. | |
700 | 1 | _aTompkins, Harland G. | |
700 | 1 | _aIrene, Eugene A. | |
856 | 4 | 1 | _3Table of contents |
856 | 4 | 2 | _3Publisher description |
856 | 4 | 2 | _3Contributor biographical information |
942 |
_2lcc _cBK |