000 00816nam a22002537a 4500
999 _c6141
_d6141
001 13632538
005 20180924113932.0
008 180924b ||||| |||| 00| 0 eng d
010 _a 2004014676
040 _aDLC
_cDLC
_dDLC
042 _apcc
050 0 0 _aQC443
_b.H26 2005
245 0 0 _aHandbook of ellipsometry /
_cedited by Harland G. Tompkins and Eugene A. Irene.
260 _aNorwich, NY :
_bWilliam Andrew Pub. ;
_aHeidelberg, Germany :
_bSpringer,
_cc2005.
300 _axvi, 870 p. :
_bill. ;
_c24 cm.
504 _aIncludes bibliographical references and index.
650 0 _aEllipsometry.
700 1 _aTompkins, Harland G.
700 1 _aIrene, Eugene A.
856 4 1 _3Table of contents
856 4 2 _3Publisher description
856 4 2 _3Contributor biographical information
942 _2lcc
_cBK