000 01762nam a22003857a 4500
999 _c6326
_d6326
001 11961253
005 20181002091948.0
008 181002b ||||| |||| 00| 0 eng d
010 _a 00689049
015 _aGBA0-1190
020 _a008043617X (alk. paper)
035 _a(DLC)11961253
040 _aUk
_cUk
_dDLC
050 0 0 _aTN689.2
_b.S877 1998
111 2 _aSymposium N on Materials and Processes for Submicron Technologies
_d(1998 :
_cStrasbourg, France)
245 1 0 _aMaterials and processes for submicron technologies :
_bproceedings of Symposium N on Materials and Processes for Submicron Technologies of the E-MRS Spring Conference, Strasbourg, France, 16-19 June 1998 /
_cedited by J.M. Martinez-Duart, R. Madar, R.A. Levy.
260 _aAmsterdam ;
_aNew York :
_bElsevier,
_c1999.
300 _ap. 1002-1175 :
_bill. ;
_c29 cm.
440 0 _aEuropean Materials Research Society symposia proceedings ;
_vv. 89
500 _aRepr. from Solid state electronics, v.43/6.
504 _aIncludes bibliographical references.
650 0 _aMicrostructure
_vCongresses.
650 0 _aSemiconductors
_vCongresses.
650 0 _aElectron transport
_vCongresses.
700 1 _aMartinez-Duart, J. M.
700 1 _aMadar, R.
700 1 _aLevy, Roland A.
_q(Roland Albert),
_d1944-
710 2 _aEuropean Materials Research Society.
_bMeeting
_d(1998 :
_cStrasbourg, France)
730 0 _aSolid state electronics.
856 4 1 _3Table of contents only
_uhttp://www.loc.gov/catdir/enhancements/fy0608/00689049-t.html
856 4 2 _3Publisher description
_uhttp://www.loc.gov/catdir/enhancements/fy0608/00689049-d.html
906 _a7
_bcbc
_ccopycat
_d3
_encip
_f20
_gy-gencatlg
942 _2lcc
_cBK