000 | 01762nam a22003857a 4500 | ||
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_c6326 _d6326 |
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001 | 11961253 | ||
005 | 20181002091948.0 | ||
008 | 181002b ||||| |||| 00| 0 eng d | ||
010 | _a 00689049 | ||
015 | _aGBA0-1190 | ||
020 | _a008043617X (alk. paper) | ||
035 | _a(DLC)11961253 | ||
040 |
_aUk _cUk _dDLC |
||
050 | 0 | 0 |
_aTN689.2 _b.S877 1998 |
111 | 2 |
_aSymposium N on Materials and Processes for Submicron Technologies _d(1998 : _cStrasbourg, France) |
|
245 | 1 | 0 |
_aMaterials and processes for submicron technologies : _bproceedings of Symposium N on Materials and Processes for Submicron Technologies of the E-MRS Spring Conference, Strasbourg, France, 16-19 June 1998 / _cedited by J.M. Martinez-Duart, R. Madar, R.A. Levy. |
260 |
_aAmsterdam ; _aNew York : _bElsevier, _c1999. |
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300 |
_ap. 1002-1175 : _bill. ; _c29 cm. |
||
440 | 0 |
_aEuropean Materials Research Society symposia proceedings ; _vv. 89 |
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500 | _aRepr. from Solid state electronics, v.43/6. | ||
504 | _aIncludes bibliographical references. | ||
650 | 0 |
_aMicrostructure _vCongresses. |
|
650 | 0 |
_aSemiconductors _vCongresses. |
|
650 | 0 |
_aElectron transport _vCongresses. |
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700 | 1 | _aMartinez-Duart, J. M. | |
700 | 1 | _aMadar, R. | |
700 | 1 |
_aLevy, Roland A. _q(Roland Albert), _d1944- |
|
710 | 2 |
_aEuropean Materials Research Society. _bMeeting _d(1998 : _cStrasbourg, France) |
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730 | 0 | _aSolid state electronics. | |
856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy0608/00689049-t.html |
856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0608/00689049-d.html |
906 |
_a7 _bcbc _ccopycat _d3 _encip _f20 _gy-gencatlg |
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942 |
_2lcc _cBK |