| 000 | 01208nam a22003617a 4500 | ||
|---|---|---|---|
| 999 |
_c6334 _d6334 |
||
| 005 | 20181002095454.0 | ||
| 008 | 181002b ||||| |||| 00| 0 eng d | ||
| 010 | _a 2015431422 | ||
| 020 | _a9781455777532 | ||
| 020 | _a1455777536 | ||
| 035 | _a(OCoLC)ocn852658240 | ||
| 040 |
_aYDXCP _beng _cYDXCP _dOCLCQ _dCUI _dOCLCF _dCDX _dDLC |
||
| 042 | _alccopycat | ||
| 050 | 0 | 0 |
_aT174.7 _b.L42 2010 |
| 100 | 1 |
_aLeach, R. K., _eauthor. |
|
| 245 | 1 | 0 |
_aFundamental principles of engineering nanometrology / _cRichard Leach. |
| 250 | _aSecond edition. | ||
| 264 | 1 |
_aAmsterdam : _bElsevier, William Andrew, _c2014. |
|
| 300 |
_axxvi, 321 pages : _billustrations ; |
||
| 336 |
_atext _btxt _2rdacontent |
||
| 337 |
_aunmediated _bn _2rdamedia |
||
| 338 |
_avolume _bnc _2rdacarrier |
||
| 490 | 1 | _aMicro & nano technologies series | |
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aNanotechnology. | |
| 650 | 0 | _aMicrotechnology. | |
| 650 | 0 | _aMetrology. | |
| 650 | 7 |
_aMetrology. _2fast _0(OCoLC)fst01018841 |
|
| 650 | 7 |
_aMicrotechnology. _2fast _0(OCoLC)fst01020132 |
|
| 650 | 7 |
_aNanotechnology. _2fast _0(OCoLC)fst01032639 |
|
| 830 | 0 | _aMicro & nano technologies. | |
| 942 |
_2lcc _cBK |
||