000 | 01032cam a22003137a 4500 | ||
---|---|---|---|
999 |
_c8201 _d8201 |
||
001 | 16720890 | ||
003 | OSt | ||
005 | 20190926085354.0 | ||
008 | 110404s2011 enka b 001 0 eng d | ||
010 | _a 2011926754 | ||
020 | _a9780815515821 (hbk.) | ||
020 | _a0815515820 (hbk.) | ||
035 | _a(OCoLC)ocn754893313 | ||
040 |
_aSISPL _cSISPL _dEIK _dCDX _dYDXCP _dCAI _dDLC |
||
042 | _alccopycat | ||
050 | 0 | 0 |
_aTS183 _b.L88 2011 |
082 | 0 | 4 |
_a620.5 _223 |
100 | 1 | _aLuttge, Regina. | |
245 | 1 | 0 |
_aMicrofabrication for industrial applications / _cRegina Luttge. |
260 |
_aOxford ; _aWaltham, MA : _bWilliam Andrew, _c2011. |
||
300 |
_axvii, 289 p. : _bill. ; _c24 cm. |
||
504 | _aIncludes bibliographical references and index. | ||
650 | 0 | _aManufacturing processes. | |
650 | 0 | _aMicrofabrication. | |
906 |
_a7 _bcbc _ccopycat _d2 _eepcn _f20 _gy-gencatlg |
||
942 |
_2lcc _cBK |