000 01032cam a22003137a 4500
999 _c8201
_d8201
001 16720890
003 OSt
005 20190926085354.0
008 110404s2011 enka b 001 0 eng d
010 _a 2011926754
020 _a9780815515821 (hbk.)
020 _a0815515820 (hbk.)
035 _a(OCoLC)ocn754893313
040 _aSISPL
_cSISPL
_dEIK
_dCDX
_dYDXCP
_dCAI
_dDLC
042 _alccopycat
050 0 0 _aTS183
_b.L88 2011
082 0 4 _a620.5
_223
100 1 _aLuttge, Regina.
245 1 0 _aMicrofabrication for industrial applications /
_cRegina Luttge.
260 _aOxford ;
_aWaltham, MA :
_bWilliam Andrew,
_c2011.
300 _axvii, 289 p. :
_bill. ;
_c24 cm.
504 _aIncludes bibliographical references and index.
650 0 _aManufacturing processes.
650 0 _aMicrofabrication.
906 _a7
_bcbc
_ccopycat
_d2
_eepcn
_f20
_gy-gencatlg
942 _2lcc
_cBK