| 000 | 01354pam a2200313 a 4500 | ||
|---|---|---|---|
| 001 | 2524330 | ||
| 003 | OSt | ||
| 005 | 20210721075654.0 | ||
| 008 | 930721s1994 njua b 001 0 eng | ||
| 020 | _a9780815520313 | ||
| 040 |
_alcc _clcc _duok |
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| 050 | 0 | 0 |
_aTP156 _bM378 2010 |
| 100 | _aMartin, Peter M. | ||
| 245 | 0 | 0 |
_aHandbook of deposition technologies for films and coatings : _bscience, applications and technology / _cedited by Peter M. Martin |
| 250 | _a3rd ed. | ||
| 260 |
_aAmsterdam. : _bElsevier, _cc2010. |
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| 300 |
_axviii, 912 p. : _bill. ; _c25 cm. |
||
| 440 | 0 |
_aMaterials science and process technology series. _pElectronic materials and process technology |
|
| 500 | _acontains indexing | ||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aCoating processes. | |
| 650 | 0 | _aCoating | |
| 730 | 0 | _aDeposition technologies for films and coatings. | |
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/description/wap041/93030751.html |
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/wap041/93030751.html |
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg |
||
| 942 |
_2lcc _cBK _e3rd edition |
||
| 999 |
_c9381 _d9381 |
||