| 000 | 00483nam a22001577a 4500 | ||
|---|---|---|---|
| 005 | 20210903082619.0 | ||
| 008 | 210903b ||||| |||| 00| 0 eng d | ||
| 020 | _a0125112211 | ||
| 020 | _a9780125112215 | ||
| 040 | _cLC | ||
| 050 |
_aTK7871.85 _b.I58 2003 |
||
| 245 |
_aInterlayer Dielectrics for semiconductor technologies/ _cS.P.Murarka, M.Eizenberg, A.K. Sinha[editors] |
||
| 300 | _axiv,444pages | ||
| 500 | _aincludes bibliographical references and Indexes | ||
| 942 |
_2lcc _cBK |
||
| 999 |
_c9416 _d9416 |
||