000 00465nam a22001577a 4500
005 20211117070028.0
008 211117b ||||| |||| 00| 0 eng d
020 _a9780080436135
040 _alc
_clc
_duok
050 _aTK 7871.85
_b.L56 1999
100 _aJ.K.N.LINDNER
245 _aION IMPLANTATION INTO SEMICONDUCTORS,OXIDES AND CERAMICS
_cJ.K.N.LINDNER
260 _aAMSTERDAM,NEW YORK
_bELSEVIER PUBLISHERS
_c1999
300 _axiv,442p
_bill
942 _2lcc
_cBK
999 _c9744
_d9744