Handbook of VLSI microlithography :
Handbook of VLSI microlithography : principles, technology, and applications /
edited by John Helbert.
- 2nd ed.
- Norwich, NY : Noyes Publications/William Andrew Pub., c2001.
- xxi, 1001 p. : ill. ;
0815514441
Integrated circuits
Microlithography.
TK7874 / .H3494 2001
0815514441
Integrated circuits
Microlithography.
TK7874 / .H3494 2001