Handbook of VLSI microlithography : (Record no. 5524)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 00501nam a22001577a 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0815514441 |
| 050 00 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TK7874 |
| Item number | .H3494 2001 |
| 245 00 - TITLE STATEMENT | |
| Title | Handbook of VLSI microlithography : |
| Remainder of title | principles, technology, and applications / |
| Statement of responsibility, etc. | edited by John Helbert. |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Norwich, NY : |
| Name of publisher, distributor, etc. | Noyes Publications/William Andrew Pub., |
| Date of publication, distribution, etc. | c2001. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xxi, 1001 p. : |
| Other physical details | ill. ; |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Integrated circuits |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microlithography. |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Helbert, John N. |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Source of acquisition | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Main Campus Library | Main Campus Library | General Stacks | 28/06/2018 | GABBY | TK7874 .H3494 2001 | 00019736 | 28/06/2018 | 28/06/2018 | General Collection |