Advances in CMP/polishing technologies for the manufacture of electronic devices / (Record no. 6142)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01196nam a22003017a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20180924115129.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 180924b ||||| |||| 00| 0 eng d |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER | |
| LC control number | 2012359712 |
| 016 7# - NATIONAL BIBLIOGRAPHIC AGENCY CONTROL NUMBER | |
| Record control number | 015874777 |
| Source | Uk |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9781437778595 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 1437778593 |
| 035 ## - SYSTEM CONTROL NUMBER | |
| System control number | (OCoLC)ocn740631119 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | BTCTA |
| Language of cataloging | eng |
| Transcribing agency | lc |
| 050 00 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TJ1280 |
| Item number | .A38 2012 |
| 245 00 - TITLE STATEMENT | |
| Title | Advances in CMP/polishing technologies for the manufacture of electronic devices / |
| Statement of responsibility, etc. | edited by Toshiro Doi, Ioan D. Marinescu, Syuhei Kurokawa. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Oxford ; |
| -- | New York : |
| Name of publisher, distributor, etc. | Elsevier, |
| Date of publication, distribution, etc. | c2012. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xii, 317 p. : |
| Other physical details | ill. ; |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Includes bibliographical references and index. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Grinding and polishing. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Chemical mechanical planarization. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Electrolytic polishing. |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Doi, Toshiro K., |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Marinescu, Ioan D. |
| Relationship | edt |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Kurokawa, Syuhei |
| Relationship | edt |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | Library of Congress Classification |
| Koha item type | General Collection |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Source of acquisition | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Library of Congress Classification | Main Campus Library | Main Campus Library | General Stacks | 24/09/2018 | Gabby | TJ1280 .A38 2012 | 00020399 | 24/09/2018 | 24/09/2018 | General Collection |