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Handbook of silicon based mems materials and technologies / Veikko Lindroos...et al

Contributor(s): Material type: TextTextSeries: Micro &Nano Technologies SeriesPublication details: Amsterdam ; Boston : William Andrew/Elsevier, 2010Description: xxxii, 639 pages 28cm Includes IndexISBN:
  • 9780815515944
Subject(s): LOC classification:
  • TK7875  .H36 2010
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Holdings
Item type Current library Call number Status Barcode
General Collection Main Campus Library General Stacks TK7875 .H36 2010 (Browse shelf(Opens below)) Available 00019717

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