Handbook of VLSI microlithography :
Handbook of VLSI microlithography : principles, technology, and applications /
edited by William B. Glendinning, John N. Helbert.
- Park Ridge, N.J., U.S.A. : Noyes Publications, c1991.
- xxii, 649 p. : ill. ;
0815512813 :
Integrated circuits
Microlithography.
TK7874 / .H3494 1991
0815512813 :
Integrated circuits
Microlithography.
TK7874 / .H3494 1991