University of Kabianga

Handbook of VLSI microlithography : (Record no. 5621)

MARC details
000 -LEADER
fixed length control field 00539pam a2200157 a 4500
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0815512813 :
050 00 - LIBRARY OF CONGRESS CALL NUMBER
Classification number TK7874
Item number .H3494 1991
245 00 - TITLE STATEMENT
Title Handbook of VLSI microlithography :
Remainder of title principles, technology, and applications /
Statement of responsibility, etc. edited by William B. Glendinning, John N. Helbert.
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. Park Ridge, N.J., U.S.A. :
Name of publisher, distributor, etc. Noyes Publications,
Date of publication, distribution, etc. c1991.
300 ## - PHYSICAL DESCRIPTION
Extent xxii, 649 p. :
Other physical details ill. ;
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Integrated circuits
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Microlithography.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Glendinning, William B.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Helbert, John N.
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type
Holdings
Withdrawn status Lost status Damaged status Not for loan Home library Current library Shelving location Date acquired Source of acquisition Total Checkouts Full call number Barcode Date last seen Price effective from Koha item type
        Main Campus Library Main Campus Library General Stacks 02/07/2018 Gabby   TK7874 .H3494 1991 00019737 02/07/2018 02/07/2018 General Collection