Handbook of VLSI microlithography : principles, technology, and applications / edited by William B. Glendinning, John N. Helbert.

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Material type: Text

TextPublication details: Park Ridge, N.J., U.S.A. : Noyes Publications, c1991.Description: xxii, 649 p. : illISBN:

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Holdings
Item type	Current library	Call number	Status	Barcode
General Collection	Main Campus Library General Stacks	TK7874 .H3494 1991 (Browse shelf(Opens below))	Available	00019737

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