University of Kabianga
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Handbook of VLSI microlithography : principles, technology, and applications / edited by John Helbert.

Contributor(s): Material type: TextTextPublication details: Norwich, NY : Noyes Publications/William Andrew Pub., c2001.Edition: 2nd edDescription: xxi, 1001 p. : illISBN:
  • 0815514441
Subject(s): LOC classification:
  • TK7874 .H3494 2001
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