University of Kabianga
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Handbook of VLSI microlithography : principles, technology, and applications / edited by William B. Glendinning, John N. Helbert.

Contributor(s): Material type: TextTextPublication details: Park Ridge, N.J., U.S.A. : Noyes Publications, c1991.Description: xxii, 649 p. : illISBN:
  • 0815512813 :
Subject(s): LOC classification:
  • TK7874 .H3494 1991
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